Nanometrology Using Interferometrically-Patterned Fiducial Grid
نویسندگان
چکیده
The ability to see and measure the results of a process is critical to advancing fabrication technology. Historically, the development of improved microscopy techniques led to rapid progress in microfabrication. Thus, the scanning-electron microscope was essential to the microelectronics revolution. Similarly, the scanning-tunnelling microscope is creating a revolution in the study of interfaces and nanostructures.
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